Molecular Beam Epitaxy of II-VI Compound Waveguides

Abstract

Thin films of ZnSe, ZnTe, Zn(SeTe), Cd(SeTe) and CdTe were grown on CdS, CdSe, CaF2, and sapphire substrates by evaporation of the elements under ultra-high vacuum. Substrate chemical polishing techniques were developed. Elemental and compound evaporation and deposition rates were measured by mass spectrometer, film thickness, and quartz crystal microbalance. Compounds grew at temperatures far above those at which elements alone would condense, but well below the compound decomposition temperatures. Films were analyzed by LEED and Auger spectroscopy. Monocrystalline films were obtained over narrow substrate temperature ranges, below which films were polycrystalline and above which deposition ceased.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Mar 25, 1974
Accession Number
AD0778354

Entities

People

  • Donald L. Smith

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms

DTIC Thesaurus Topics

  • Contracts
  • Crystallography
  • Crystals
  • Diffraction
  • Elements
  • Epitaxial Growth
  • Mass Spectrometers
  • Materials
  • Measurement
  • Microscopy
  • Molecular Beam Epitaxy
  • Molecular Beams
  • Refractive Index
  • Scattering
  • Semiconductors
  • Silicon Carbide
  • Spectroscopy

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Thin Film Deposition Science.