Properties of RF Sputtered Zinc Oxide Thin Films for Microwave Acoustic Devices.

Abstract

Various factors involved in the production of piezoelectric zinc oxide thin films and their utilization as acoustic transducers were studied, along with techniques for analysis and fabrication of actual devices. The best transducers in this study exhibited coupling constants approximately 60% as large as the theoretical value and a minimum untuned insertion loss of 30 dB. Bulk transducer technology was emphasized, since analysis of the zinc oxide film is relatively easy in this configuration; however, most of the concepts are directly applicable to surface wave transducers, the ultimate motivation for this work. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 01, 1974
Accession Number
AD0779260

Entities

People

  • M. Finnley
  • T. R. Larson

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Couplings
  • Fabrication
  • Films
  • Insertion Loss
  • Losses
  • Microwaves
  • Motivation
  • Oxide Films
  • Oxides
  • Production
  • Surface Waves
  • Thin Films
  • Transducers
  • Waves

Readers

  • Acoustics.
  • Semiconductor Device Technology
  • Systems Analysis and Design