Ion Beam Optical Polishing System Computer Programs,

Abstract

A low energy ion beam accelerator system has been developed for fabrication of precision optical elements. This system forms optical surfaces by means of computer controlled sputtering and optical reticles by means of computer controlled implantation. The source language computer programs used to drive the accelerator are listed and described. (Author)

Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1973
Accession Number
AD0781959

Entities

People

  • James D. Lester

Tags

DTIC Thesaurus Topics

  • Charged Particles
  • Computer Programs
  • Computers
  • Fabrication
  • Implantation
  • Ion Beams
  • Ions
  • Language
  • Polishing
  • Precision
  • Sputtering

Fields of Study

  • Physics

Readers

  • Computer Science.
  • Pulsed Power and Plasma Physics.
  • Thin Film Deposition Science.