Study of Electronic Transport and Breakdown in Thin Insulating Films

Abstract

This report reviews progress in a comprehensive research program directed toward a basic understanding of electronic transport, charge trapping, and dielectric breakdown in the thin insulating films used in integrated circuits. Research is reported in the following areas: Corona-induced nondestructive breakdown in insulating films; Self-quenched breakdown of insulating films; Charge-discharge studies of charge-carrier trapping in insulating films; Charge injection by electron beam; Scanning electron microscope studies; Study of lateral nonuniformities in metal-insulator- semiconductor structures; Monte-Carlo calculations of hot-electron distributions; and Theoretical modeling of local breakdown.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1974
Accession Number
AD0783870

Entities

People

  • Murray A. Lampert
  • Walter C. Johnson
  • Wilmer R. Bottoms

Organizations

  • Princeton University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Band Structures
  • Charge Carriers
  • Conduction Bands
  • Electric Fields
  • Electrical Engineering
  • Electron Beams
  • Electron Microscopes
  • Electron Microscopy
  • Energy Bands
  • Films
  • Measurement
  • Microscopes
  • P-N Junctions
  • Scanning Electron Microscopes
  • Semiconductor Devices
  • Semiconductors
  • Steady State

Fields of Study

  • Physics

Readers

  • Fluid Mechanics and Fluid Dynamics.
  • Materials Science and Engineering.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene