Analysis of Physical Parameters in Electron-Beam-Irradiated Semiconductor Diodes.
Abstract
The basic interaction theory of parameters such as thickness, impurity density, area, and external supply voltage required for various power-frequency applications is discussed for multiple electron-beam-irradiated semiconductor diodes connected in series. Two general approaches are outlined for use in CW class-B applications: (1) a minimum-thickness approach for reducing the transit-time limitations for a tuned-output high-frequency type of operation, and (2) a minimum-area approach for reducing the diode capacitance, as is desired for wide-bandwidth applications. Guidelines are also provided for changing the design conditions by altering constraints such as maximum allowed electric field, minimum allowed electric field, and heat dissipation. The power-frequency capabilities of the device are discussed in terms of present state-of-the-art fabrication limitations in controlling thickness, electromigration of the Al overlayer, uniformity of the electron beam, and electron-hole generation rate. (Modified author abstract)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 31, 1972
- Accession Number
- AD0785082
Entities
People
- George A. Haas
Organizations
- United States Naval Research Laboratory