Optical Waveguides from Selected II-IV Semiconductors by Ion Implantation and Diffusion.

Abstract

Several II-VI semiconductors were examined for their usability as optical waveguides. A reproducible procedure was developed for polishing II-VI compounds to optical flatness. The procedure was especially effective for ZnSe and ZnTe. Ion implantation and diffusion were used with several combinations of dopants and substrates in attempts to produce both planar and channel optical waveguides. Proton enhanced diffusion of Cd into ZnSe produced a lossy planar waveguide, while diffusing Cd into ZnTe produced an excellent quality planar waveguide. This was the first positive proof of successful diffusion of Cd into ZnTe. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1974
Accession Number
AD0787698

Entities

People

  • Richard L. Morgan

Organizations

  • Air Force Institute of Technology

Tags

DTIC Thesaurus Topics

  • Compound Semiconductors
  • Diffusion
  • Electronics
  • Implantation
  • Ion Implantation
  • Ions
  • Optical Waveguides
  • Polishing
  • Semiconductors
  • Solid State Electronics
  • Substrates
  • Waveguides

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Nanofabrication and Microfabrication.
  • Optical Fiber Sensing and Electromagnetic Propagation.

Technology Areas

  • Microelectronics