THIN LAYER CAPACITANCE IN MICROELECTRONICS.

Abstract

A method of making thin layer capacitance with consideration of the applied materials is described. Hypotheses explaining the effect of capacitor dimensions on its proper capacitance are presented. Attention is paid to the fact, that most likely the cover material is also one of the factors designating this capacitance. (Author)

Document Details

Document Type
Technical Report
Publication Date
Oct 07, 1966
Accession Number
AD0803850

Entities

People

  • A. Wolkenberg

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Capacitance
  • Capacitors
  • Hypotheses
  • Materials
  • Microelectronics

Readers

  • Electrical Engineering
  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene