THIN LAYER CAPACITANCE IN MICROELECTRONICS.
Abstract
A method of making thin layer capacitance with consideration of the applied materials is described. Hypotheses explaining the effect of capacitor dimensions on its proper capacitance are presented. Attention is paid to the fact, that most likely the cover material is also one of the factors designating this capacitance. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 07, 1966
- Accession Number
- AD0803850
Entities
People
- A. Wolkenberg
Organizations
- National Air and Space Intelligence Center