THIN-FILM CIRCUITS PRODUCT IMPROVEMENT,
Abstract
The report covers the mechanical redesign and modifications which were accomplished on the NAFI in-line vacuum deposition machine during the up-dating program in order to insure greater reliability of operation. It also covers the steps taken to improve the processes attending the fabrication of thin-film circuitry on glass substrates in an effort to produce a more reliable product at an acceptable yield rate. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 15, 1966
- Accession Number
- AD0805558
Entities
People
- John F. Mcginley
- John H. Patton