HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Abstract
Progress has been made in the application of the unbakeable field-emitter-scanning electron microscope to sensitive detection of particular energy electrons on storage targets. The energy selector section of the collection system has been vastly improved and is now capable of selectively detecting a 5-ev band of electrons at any energy in the range from 10 to 50 ev or perhaps more. All other energy electrons are strongly excluded. With this system we have seen the proper groups of secondary electrons and obtained the high contrast desired. We are now in a position to demonstrate voltage-sensitive contrast on molybdenum-alumina-molybdenum film sandwiches with etched holes in the micron range, and we should shortly be able to proceed to the first demonstration of storage and readout on isolated submicron capacitor elements. Work is well under way on a mildly bakeable lens system and ultr-high-vacuum station to replace the above system. This new system will eliminate many of the problems of the present one, e.g., ambient ac magnetic fields which limit present resolution to 1/2-1mu, and polymerization contamination problems. Work has continued on the machining of regular arrays of storage holes, and small regular arrays are described. This work is being done with a commercial electron microscope that has been converted to a scanning probe. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1967
- Accession Number
- AD0807338
Entities
People
- Denis L. Cogswell
- John Kelly
- Kendal T. Rogers
Organizations
- SRI International