PRODUCTION ENGINEERING MEASURE FOR SILICON SWITCHING TRANSISTORS.
Abstract
Efforts were continued on a program to establish a production capability for a silicon NPN micropower switching transistor, type EL-2N(X-10). Work centered about finalization of material, diffusion, and probe specifications for the preproduction and production diffusion runs. Devices built to supply the final engineering sample have demonstrated the capability to produce both preproduction and producrion quantities. Additional processing work resulted in photoresist processing being improved by the addition of infrared procedures, contact metallization being improved by the revision of two cleaning procedures, and greater parameter stability being provided by the revision of assembly atmospheres.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 25, 1966
- Accession Number
- AD0807416
Entities
People
- Jack Freese
- Mark Siegel
Organizations
- Motorola Mobility