DEVELOPMENT ON HIGH TEMPERATURE INSULATION MATERIALS.
Abstract
Aluminum nitride pyrolytically deposited by passing aluminum chloride vapors and excess ammonia over heated molybdenum substrates, still contain some hydrolytically unstable component. Films of evaporated aluminum on molybdenum rods have been nitrided to aluminum nitride by heating them to 1250 C in a flow of ammonia. Reduced pressure pyrolysis of silane and ammonia has resulted in better quality, thicker, continuous films of silicon nitride which are capable of electrical insulation at high temperatures. Films, which can be either crystalline or amorphous, have been investigated by means of infrared spectroscopy, x-ray diffraction, mass spectroscopy, microscopic examination of polished cross sections and measurement of electrical properties. Solid by-products of the reaction have also been characterized to a limited extent and the purity of the reactant and carrier gases has been determined. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1966
- Accession Number
- AD0808946
Entities
People
- D. Berg
- D. W. Lewis
- J. N. Esposito
- T. W. Dakin