MANUFACTURING IN-PROCESS CONTROL AND MEASUREMENT TECHNIQUES FOR INTEGRAL ELECTRONICS (CONNECTIONS AND LIFETIME).
Abstract
A program directed toward the development of contactless, non-destructive techniques for the measurement and ultimately for the control of: (1) carrier lifetime in semiconductors (silicon); and (2) lead/header bonding integrity (silicon-gold-sapphire). Two concepts for contactless carrier lifetime measurements were investigated: (1) laser-induced modulation of infrared transmission through silicon; and (2) laser-induced modulation of photo-electric emission from silicon. The concept studied under the lead and header bonding integrity portion of this effort was the correlation of mechanical bond strength with polarized infrared displays of the birefringent stress pattern induced in silicon as a result of the bonding process. Equipment developed for the study and evaluation of these contactless measurement techniques is described. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1967
- Accession Number
- AD0809945
Entities
People
- Arthur A. Klebba
- Robert A. Dicurcio