THIN METAL FILMS AND THEIR USE IN FILM TYPE RESISTORS (DUNNE METALLSCHICHTEN UND IHRE ANWENDUNG FUR SCHICHTWIDERSTANDE).
Abstract
Vapor condensation (0.0001) is the only industrially used method for production of thin metal layers on ceramic supports, by vaporization from melt or by sublimation. Problems of reproducibility in physical properties of the layers (resistancy anomalies), structural changes by atom rearrangements, and clusters development (recrystallization) as observed in electron micrographs are demonstrated, as a function of temperature and time, for Ag, Ni, and Cr layers. When the energy is less than that required for reordering and recrystallization, the layer remains in the amorphous state, lacking conduction electrons. A low condition of semiconductory type and a high contamination of the metal with foreign atoms is observed, with a negative temperature coefficient of resistance. Industrial production of ceramic support shapes with vapor-condensed metal layers is described, using a W heating spiral from which the metal is evaporized.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 21, 1967
- Accession Number
- AD0815703
Entities
People
- Erhard Schippel
Organizations
- National Air and Space Intelligence Center