EVALUATION OF VARIOUS INSTRUMENTAL AND ANALYTICAL METHODS FOR THE SUPPORT AND DEVELOPMENT OF THIN FILM MICROELECTRONIC DEVICES.

Abstract

Development and fabrication of thin film microelectronic devices requires three types of information on materials used: atomic and molecular composition, crystalline structure and orientation, and surface effects. Fifteen analytical methods of obtaining this information were considered; advantages and limitations of each method are defined; methods cover measurements from grossly qualitative to high precision quantitative. (Author)

Document Details

Document Type
Technical Report
Publication Date
Dec 20, 1967
Accession Number
AD0825192

Entities

People

  • David A. Lutz

Organizations

  • Naval Air Warfare Center Warminster

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Fabrication
  • Films
  • Materials
  • Measurement
  • Orientation (Direction)
  • Precision
  • Thin Films

Readers

  • Computational Modeling and Simulation
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene