SINGLE-CRYSTAL DIELECTRIC FILMS,

Abstract

Techniques for vacuum depositing single-crystal dielectric films have been investigated and structural analysis of these films utilizing electron microscopy and electron diffraction has been performed. The dependence of film structure upon thermal history and the dependence of film structure upon background pressure during deposition have been investigated. (Author)

Document Details

Document Type
Technical Report
Publication Date
Dec 21, 1967
Accession Number
AD0825231

Entities

People

  • A. S. Mackin
  • W. M. Gibleski

Organizations

  • Naval Air Warfare Center Warminster

Tags

DTIC Thesaurus Topics

  • Crystals
  • Dielectric Films
  • Diffraction
  • Electron Diffraction
  • Electron Microscopy
  • Electrons
  • Films
  • Microscopy
  • Single Crystals
  • Structural Analysis

Fields of Study

  • Physics

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene