THIN FILM RC NETWORKS FOR SILICON INTEGRATED CIRCUITS.

Abstract

Resistor and capacitor elements were fabricated on oxidized silicon substates. Individual components, as well as resistor-transistor, capacitor-transistor, and resistor-capacitor-transistor integrated networks, were fabricated and tested with regard to their performance and reliability.

Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1968
Accession Number
AD0827212

Entities

People

  • Louis E. Terry

Organizations

  • Motorola Mobility

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Active Electronic Components
  • Capacitors
  • Circuits
  • Electronic Components
  • Electronic Equipment
  • Electronics
  • Field Effect Transistors
  • Films
  • Integrated Circuits
  • Networks
  • Reliability
  • Resistors
  • Semiconductor Devices
  • Thin Films
  • Transistors

Readers

  • Integrated Circuit Design and Technology.
  • Thin Film Deposition Science.