RESEARCH ON VAPOR PLATING FROM ORGANOMETALLIC COMPOUNDS.

Abstract

Experimental work was conducted to evaluate and optimize methods for the chemical vapor deposition of titanium, tungsten, molybdenum, boron, iridium and vanadium, respectively, from selected organometallic compounds. Box statistical experimental design methods were used in the work to facilitate the study of the effects of the deposition parameters on the properties of the deposits and to isolate the path of steepest ascent for optimizing the deposition conditions to give the purest deposits obtainable. (Author)

Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1968
Accession Number
AD0829407

Entities

People

  • Buford A. Macklin

Tags

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Coatings
  • Deposition (Materials Processing)
  • Elements
  • Experimental Design
  • Metals
  • Molybdenum
  • Organometallic Compounds
  • Plating
  • Refractory Metals
  • Titanium
  • Transition Metals
  • Tungsten
  • Vanadium
  • Vapor Deposition
  • Vapor Plating

Readers

  • Computational Modeling and Simulation
  • Operations Research
  • Surface Engineering/Surface Coating Technology.