PIEZOELECTRIC THIN FILM TRANSDUCERS.
Abstract
The methods by which CdS vapor deposition procedures and equipment have been improved are discussed. Techniques for multilayer transducers are described, together with microwave acoustic attenuation measurements on various dielectric and semiconductor materials. A method of modifying a standard evaporator for CdS film fabrication is given. Film thickness measurement procedures are reviewed and theoretical discussions are included to account for the attenuation measurements made. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 31, 1967
- Accession Number
- AD0829671
Entities
People
- John De Klerk