STUDY OF THE HIGH YIELD SPUTTERING OF REFRACTORY METALS.
Abstract
Some fundamental aspects of the problem of increase of sputtering yields of hafnium, tantalum, tungsten, and rhenium are discussed and the different methods to improve these yields are proposed. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 13, 1968
- Accession Number
- AD0833788
Entities
People
- P. Vujacic
Organizations
- Naval Air Warfare Center Warminster