STATUS OF DYSPROSIUM-BORON-SILICON OXIDE DIELECTRIC SYSTEM.

Abstract

This report describes the progress made toward the evaluation of the high-temperature dysprosium-boron-silicon thin-film capacitor emphasizing the yield, shelf life, pinhole control, composition, and temperature tolerance tests; it reveals the necessity for obtaining greater reproducibility by new evaporation and analytical techniques. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 10, 1968
Accession Number
AD0833814

Entities

People

  • N. E. Macmeekin

Organizations

  • Naval Air Warfare Center Warminster

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Capacitors
  • Dysprosium
  • Evaporation
  • Films
  • High Temperature
  • Reproducibility
  • Shelf Life
  • Test And Evaluation
  • Thin Film Capacitors
  • Thin Films
  • Transition Temperature

Fields of Study

  • Physics

Readers

  • Systems Analysis and Design
  • Thin Film Deposition Science.