DETERMINATION OF THICKNESS AND COMPOSITION OF THIN FILMS BY THE METHOD OF X-RAY FLUORESCENCE.
Abstract
X-Ray fluorescence techniques were used to determine the thickness and composition of films of solid solution cadmium sulfide/selenide, using a G.E.XRD-6 system. Standard curves of Se K lambda and Cd K lambda x-ray fluorescence intensities versus film thickness were established for films (CdSe percentages 0,25,50,77, and 100%) up to 10.00 microns thick on aluminum substrates. Film thickness accuracies were 0.200 plus or minus 0.05-10.00 plus or minus 0.40 microns. Se K lambda to Cd K lambda intensity ratio was used to determine film composition to within 2%. Effects of molybdenum, niobium, copper, and glass substrates on fluorescence intensities were determined. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1968
- Accession Number
- AD0836043
Entities
People
- James Thomas Carpenter
Organizations
- Air Force Institute of Technology