ON THE PROBLEMS OF VACUUM TECHNOLOGY IN THE PREPARATION OF THIN FILMS (K OTAZKAM VAKUOVE TECHNOLOGIE PRI PRIPRAVE TENKYCH VRSTEV),

Abstract

The article presents a survey of modern methods of vacuum technique, a knowledge and mastery of which are necessary in the production of thin layers.

Document Details

Document Type
Technical Report
Publication Date
Dec 05, 1967
Accession Number
AD0839145

Entities

People

  • Werner Espe

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Films
  • Thin Films

Readers

  • Canadian European Scientific Immigration and Epilepsy Clearance Studies
  • Systems Analysis and Design
  • Thin Film Deposition Science.