ON THE PROBLEMS OF VACUUM ENGINEERING IN THE PREPARATION OF THIN FILMS (K OTAZKAM VAKUOVE TECHNOLOGIE PRI PRIPRAVE TENKYCH VRSTEV),

Abstract

The article is the conclusion of an article in No. 10, 1965, of this journal. It deals with low-temperature cooling, design problems of sealing in equipment for the production of thin films, resistance heating, electron bombardment, the evaporating 'brake' and methods of producing thin films without the use of vacuum. (Author)

Document Details

Document Type
Technical Report
Publication Date
Dec 27, 1967
Accession Number
AD0841824

Entities

People

  • W. Espe

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Czechoslovakia
  • Electrons
  • Engineering
  • Films
  • Low Temperature
  • Production
  • Production Engineering
  • Production Management Methods
  • Productivity
  • Resistance
  • Thin Films

Fields of Study

  • Physics

Readers

  • Canadian European Scientific Immigration and Epilepsy Clearance Studies
  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene