Instrument for the Noncontact Measurement of Thin Semiconductor Film Parameters.

Abstract

An instrument is described for the rapid measurement of parameters (dark current and photoconductivity) of semiconductor films without the necessity of applying special electrodes to these films. The method is based on the use of a Hartley oscillator. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1968
Accession Number
AD0843103

Entities

People

  • I. B. Shulga
  • M. K. Sheinkman

Organizations

  • United States Army Foreign Science and Technology Center

Tags

DTIC Thesaurus Topics

  • Carbides
  • Chemical Compounds
  • Compound Semiconductors
  • Electrodes
  • Electronics
  • Inorganic Carbon Compounds
  • Inorganic Chemicals
  • Measurement
  • Oscillators
  • Photoconductivity
  • Semiconductors
  • Silicon Carbide
  • Solid State Electronics

Readers

  • Optical Physics and Photonics.
  • Systems Analysis and Design
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene