Applications of Thin Films in Electronics,

Abstract

The authors review the application of thin films produced by vacuum vaporization, cathode sputtering, diffusion, and epitaxial growing in the fields of passive and active electric components and microminiaturization. Some of the most important characteristics of thin films are summarized. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 04, 1968
Accession Number
AD0845594

Entities

People

  • G. Motal
  • J. Boros-gyevi

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Diffusion
  • Electronics
  • Films
  • Microminiaturization
  • Sputtering
  • Thin Films
  • Vaporization

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Pulsed Power and Plasma Physics.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene