Quality Defects in Integrated Circuits.
Abstract
The study was conducted in order to identify and classify processing defects observed in integrated circuits, and to determine the relative importance of these defects in terms of product reliability. Its primary concern has been with defects induced during wafer processing and subsequent operations, such as electrical die sort, scribing, and bonding. The study had, as a corollary objective, the development of effective screens to segregate circuits containing these defects, without impairing the quality of the resulting set of devices designated for ultimate usage in the end product. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1968
- Accession Number
- AD0846723
Entities
People
- Peter Gott
- Richard Soltau