Application of Thin Films in Electronics,

Abstract

The article reviews the application of thin films (produced by vacuum evaporation, cathode sputtering, diffusion and epitaxial growing) in the field of passive and active electric components and in microminiaturization. Some of the characteristics of thin films are summarized. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 25, 1968
Accession Number
AD0847073

Entities

People

  • G. Motal
  • J. Boros-gyevi

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Diffusion
  • Electronics
  • Evaporation
  • Films
  • Microminiaturization
  • Sputtering
  • Thin Films

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene