Manufacturing Methods for Integrated Circuits Using MOS Transistors.

Abstract

A report is made on phased program to establish the manufacturing methods for complementary 'N' and 'P' channel enhancement mode and 'N' channel depletion mode MOS integrated circuits. The major phases of the program were: (1) Device Selection; (2) Establishment of a Fabricating Process; (3) Pilot Line Production, and (4) Reliability Evaluation. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1969
Accession Number
AD0850892

Entities

People

  • Brian L. Jones
  • Don Frohman
  • Robert E. Hurlston
  • Thomas Klein
  • Willard L. Kauffman

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Circuits
  • Electronic Equipment
  • Electronics
  • Integrated Circuits
  • Manufacturing
  • Performance (Engineering)
  • Production
  • Reliability
  • Semiconductor Devices
  • Semiconductor Manufacturing
  • Solid State Electronics
  • Test And Evaluation
  • Transistors

Fields of Study

  • Engineering

Readers

  • Integrated Circuit Design and Technology.
  • Software Engineering