Application of Quartz Resonators for Weighing Thin Films and for Microweighing,
Abstract
If a quartz-resonator plate, excited to the thickness-shear vibration, is coated with a film of foreign material, the natural frequency of the plate will change because of the increased mass now oscillating. Since the frequency changes of a quartz resonator can be measured very accurately, this offers a very accurate method for weighing thin films.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1962
- Accession Number
- AD0852719
Entities
People
- Guenter Sauerbrey
Organizations
- General Dynamics