Chemical Vapor Deposition of Aluminum Oxide Ceramic Shapes.

Abstract

Conditions for forming free standing forms of dense, coherent aluminum oxide are discussed. The process involves chemical vapor deposition of aluminum oxides on suitable substrates; deposits are initially formed as fine grain or epitaxial coatings.

Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1969
Accession Number
AD0854553

Entities

People

  • A. Waugh
  • B. Albanese
  • H. A. Hobbs Jr.
  • W. D. Kingery

Tags

DTIC Thesaurus Topics

  • Aluminum
  • Aluminum Oxides
  • Chemical Vapor Deposition
  • Coatings
  • Oxides
  • Substrates
  • Vapor Deposition

Readers

  • Thin Film Deposition Science.