Mobile Switching and Multiplex Terminal.
Abstract
A new type of memory cell circuit is described. The circuit is unique in that four modes of operation are possible making it especially useful for communication systems, and it can be made in a very small size. The unit cell of the memory was first assembled and tested using discrete components. This was followed by a careful study of the integration of the circuit into a silicon substrate. The final cell size will be 10 x 12 microns. The process and integration design was tested by the optical fabrication of a 2 x 1 cell array (70 x 110 micrometers). Tests proved the soundness of the concepts and the integrated design. A test of scanning microscope fabrication was carried out under computer control to draw the patterns for 50 x 60 micrometer cells. Some partially operating circuits were achieved. Misalignment of patterns in the early stage of development was the cause. This was corrected at the end of the program. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1969
- Accession Number
- AD0855393
Entities
People
- David Green
- Michael M. Sopira
- Stephen J. Angello