Research Toward Preparing Bulk Shapes of Beryllium Oxide by Chemical Vapor Deposition Techniques.

Abstract

Research and development on the chemical vapor deposition method of producing free standing shapes of dense pure beryllium oxide is described. The current program involves the supporting research necessary to scale-up the vapor deposition process. The major effort in this report period centered about analyzing the sublimation characteristics of the beryllium basic formate prepared in the fluid bed sublimation apparatus. Theoretical and empirical studies in this area are reported. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jun 15, 1969
Accession Number
AD0855659

Entities

People

  • John F. Zeitts
  • P. L. Fleischner

Tags

DTIC Thesaurus Topics

  • Beryllium
  • Chemical Vapor Deposition
  • Deposition (Materials Processing)
  • Fluids
  • Material Coating Processes
  • Materials Processing
  • Sublimation
  • Vapor Deposition
  • Vapors

Readers

  • Aerosol Science/Aerosol Physics
  • Semiconductor Device Technology
  • Systems Analysis and Design