Procedural Guidelines for the Reliability Assessment of Large-Scale Integrated Circuits.
Abstract
A study and investigation was performed to develop procedural guidelines for predicting and assessing the reliability of electronic equipment and systems using large-scale integrated (LSI) circuit arrays. The program included an analytical study of available published information, supplemented by experimental studies of multilevel metallized structures and LSI arrays. An extensive bibliography, containing over 450 references, was compiled. The analytical studies performed included a determination and detailed consideration of the factors that affect the reliability of LSI arrays, including important reliability-related factors in the fabrication processes. Consideration was given to reliability screening, electrical acceptance testing of finished LSI arrays, and system considerations. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1969
- Accession Number
- AD0858369
Entities
People
- Earl S. Schlegel
- George Schnable
- Michael M. Schlacter
- Ralph S. Keen
- Richard A. Lathlaen