A Microcircuit Laboratory for the Underwater Electrical Engineering Department,

Abstract

A clean room microelectronic laboratory has been completed in the Code 520, Underwater Electrical Engineering Department. This report describes the laboratory, the equipment and the capability. The laboratory is relatively small, occupying only 400 square feet of floor space, but is complete in that it is capable of performing most of the required techniques for fabricating microelectronic circuits with the major exception of diffusion. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jun 26, 1969
Accession Number
AD0860153

Entities

People

  • Clarence R. Wood Jr

Organizations

  • Naval Ordnance Laboratory

Tags

DTIC Thesaurus Topics

  • Buildings And Structures
  • Circuit Analysis
  • Circuit Testers
  • Circuits
  • Diffusion
  • Electrical Engineering
  • Electronic Equipment
  • Electronics Laboratories
  • Engineering
  • Laboratory Equipment
  • Microcircuits
  • Research Facilities
  • Test Equipment

Fields of Study

  • Engineering

Readers

  • Electrical Engineering
  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems
  • Space