Thin-Film Channel-Multiplier Arrays.

Abstract

Developmental work on a novel method for forming arrays of submicron-diameter electron-multiplier channels in thin-wafer form is described. The method is based on the development and adaptation of appropriate thin-film techniques. The four major aspects of the method are: (1) the formation of perimeter-supported base films, (2) the formation of arrays of submicron-size holes in such base films, (3) the exploration of resistive dynode film materials having the requisite resistivity and electrical breakdown strength, and (4) vacuum deposition of such dynode material onto holey base films, thereby forming microchannels by propagation of the holes. (Author)

Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1969
Accession Number
AD0863952

Entities

People

  • C. A. Spindt

Organizations

  • SRI International

Tags

DTIC Thesaurus Topics

  • Diameters
  • Electron Multipliers
  • Electrons
  • Films
  • Materials
  • Materials Processing
  • Thin Films
  • Vacuum Deposition

Readers

  • Nanofabrication and Microfabrication.
  • Semiconductor Device Technology
  • Systems Analysis and Design

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene