Thin-Film Channel-Multiplier Arrays.
Abstract
Developmental work on a novel method for forming arrays of submicron-diameter electron-multiplier channels in thin-wafer form is described. The method is based on the development and adaptation of appropriate thin-film techniques. The four major aspects of the method are: (1) the formation of perimeter-supported base films, (2) the formation of arrays of submicron-size holes in such base films, (3) the exploration of resistive dynode film materials having the requisite resistivity and electrical breakdown strength, and (4) vacuum deposition of such dynode material onto holey base films, thereby forming microchannels by propagation of the holes. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1969
- Accession Number
- AD0863952
Entities
People
- C. A. Spindt
Organizations
- SRI International