Development of Thin-Film Active Devices on an Improved Insulating Substrate.

Abstract

It is the purpose of this program to further improve the properties of silicon thin films epitaxially deposited on single crystal magnesium aluminate spinel; to develop device processing techniques specific to the silicon-spinel system; and to evaluate various device structures fabricated in the silicon-spinel composite. (Author)

Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1969
Accession Number
AD0864020

Entities

People

  • G. W. Cullen

Organizations

  • Sarnoff Corporation

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Aluminates
  • Chemical Compounds
  • Composite Materials
  • Crystals
  • Films
  • Gems (Minerals)
  • Inorganic Chemicals
  • Magnesium
  • Materials
  • Single Crystals
  • Spinel
  • Substrates
  • Thin Films

Fields of Study

  • Materials science

Readers

  • Civilian Systems Systems Program Capability Development and Upgrade Support Activity Expense and Pay Management.
  • Materials Science and Engineering.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene