High Temperature Pressure Transducers.
Abstract
This report describes work which was carried out toward the design and evaluation of a solid state transducer intended to operate from -50 to +350C and to sustain exposure to 450C. A flaw, partly affecting the fabrication and partly affecting the operation of the device was discovered in the use of silicon as both diaphragm and gauges. Another design approach is presented in which silicon gauges are bonded to a thin beam which is deflected by a metal diaphragm. Means of making high temperature electrical contacts to silicon are presented, as well as methods to join silicon to the structure. Data for the stability of the gauging system and contacts at elevated temperatures are given. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1969
- Accession Number
- AD0865429
Entities
People
- David J. First
- George F. Hurley
- Henry B. Heller
- John P. Pugmaire