Development of Thin-Film Active Devices on an Improved Insulating Substrate.
Abstract
The purpose of the study is to improve the properties of silicon thin films epitaxially deposited on single crystal magnesium aluminate spinel; to develop device processing techniques specific to the silicon-spinel system; and to evaluate various device structures fabricated in the silicon-spinel composite. (author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1970
- Accession Number
- AD0866744
Entities
People
- D. Leibowitz
- G. W. Cullen
Organizations
- Sarnoff Corporation