The Technology of Epitaxial Silicon Layers from SiCl4.

Abstract

Procedures for the deposition of epitaxial layers for integrated circuits were developed, and the capacity to produce device-quality epitaxial layers was successfully established. Specific problems that occurred were analyzed and corrective procedures outlined. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 30, 1970
Accession Number
AD0869162

Entities

People

  • J. J. Symanski

Organizations

  • Navy Electronics Laboratory

Tags

DTIC Thesaurus Topics

  • Circuits
  • Electrical Circuits
  • Electrical Equipment
  • Electronic Circuits
  • Electronic Equipment
  • Electronics
  • Integrated Circuits
  • Networks

Readers

  • Aerospace Test and Evaluation
  • Combustion science or combustion engineering.
  • Semiconductor Device Technology