Development of Thin-Film Active Devices on an Improved Insulating Substrate.
Abstract
The purpose of the program is to further improve the properties of silicon thin films epitaxially deposited on single crystal magnesium aluminate spinel; to develop device processing techniques specific to the silicon-spinel system; and to evaluate various device structures fabricated in the silicon-spinel composite. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1970
- Accession Number
- AD0872313
Entities
People
- D. Leibowitz
- F. C. Dougherty
- G. E. Gottlieb
- Glenn W. Cullen
- J. F. Corboy
Organizations
- Sarnoff Corporation