Silicon-on-Sapphire Transistor Development.
Abstract
The report discusses further advances made in the silicon-on-insulator system resulting from the use of improved materials and from the use of improved thin-film processing techniques. The work was concentrated on achieving higher speed transistors by: Improving the starting silicon; Developing and optimizing new processing techniques needed for high-speed transitor fabrication; and Making both low- and high-frequency measurements on finished devices to determine their high-frequency capabilities. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1971
- Accession Number
- AD0879620
Entities
People
- David J. Dumin
- Paul H. Robinson
- Ram S. Ronen
Organizations
- Sarnoff Corporation