Electroreflectance. Part 7. MOS Techniques.

Abstract

A thin film technique of fabricating samples for surface barrier electroreflectance measurements is described. Aluminum oxide forms the dielectric spacer and semitransparent nickel is used for the field electrods. The resulting MOS capacitor is transparent from below 0.4 eV to at least 7.5 eV and has no low temperature limitation. Spectra have been obtained on a large class of semiconductor materials using this technique. Qualitative features of the optical response suggest that the surface potential is not clamped by slow surface states, even at room temperature. This method is therefore suitable for quantitative experiments in which the surface field is determined by an auxiliary measurement of surface conductance or capacitance. Application of these preparation techniques to other experiments is suggested. (Author)

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1972
Accession Number
AD0904112

Entities

People

  • John E. Fischer

Organizations

  • Naval Air Weapons Station China Lake

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Aluminum
  • Aluminum Oxides
  • Capacitance
  • Capacitors
  • Chemical Compounds
  • Compound Semiconductors
  • Electronics
  • Films
  • Low Temperature
  • Materials
  • Measurement
  • Oxides
  • Semiconductors
  • Solid State Electronics
  • Spectra
  • Thin Films

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Electronics Engineering
  • Materials Science and Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene