Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.

Abstract

The purpose of this contract is to establish and demonstrate, under production conditions, the use of electron-beam photolithography in the fabrication of integrable microwave transistors. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1972
Accession Number
AD0905638

Entities

People

  • Daniel R. Ch'en
  • Gilbert L. Varnell
  • John M. Pankratz

Organizations

  • Texas Instruments

Tags

DTIC Thesaurus Topics

  • Contracts
  • Electron Beams
  • Electrons
  • Engineering
  • Fabrication
  • Microwaves
  • Photolithography
  • Production
  • Production Engineering
  • Production Management Methods
  • Productivity
  • Transistors

Fields of Study

  • Physics

Technology Areas

  • Directed Energy
  • Microelectronics