Structural Characterization of Materials by Use of Electron Microscopy and Spectroscopy.

Abstract

The present status of the techniques of conventional electron microscopy, energy analyzing and energy selecting microscopy, direct resolution microscopy, high-voltage microscopy, and scanning electron microscopy is critically discussed and future trends are indicated. The basic principles of each technique and types of application are reviewed.

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1971
Accession Number
AD0906267

Entities

People

  • Eric Lifshin
  • V. A. Phillips

Organizations

  • General Electric

Tags

DTIC Thesaurus Topics

  • Electron Microscopy
  • Electrons
  • High Voltage
  • Materials
  • Microscopy
  • Optical Analysis
  • Scanning
  • Scanning Electron Microscopy
  • Spectroscopy
  • Voltage

Readers

  • Electrical Engineering
  • Nanofabrication and Microfabrication.
  • Theoretical Analysis.

Technology Areas

  • Microelectronics