Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.
Abstract
During the sixth quarter of work significant progress was made in upgrading the electron beam machine, and the machine was moved to a new clean room. A LaB6 electron gun, an electrostatic beam blanking unit, and a new computer/machine interface (bean control waveform generator) were installed on the instrument and are functioning to specifications. Major modifications were made to the pattern generation and auto-align software to take advantage of the new capabilities of the upgraded system. These software subsystems and the stage movement software are completely functional. No microwave transistor lots were initiated during the sixth quarter because of the instrument upgrading effort. E-beam delineation was limited to pattern generation, auto-align, and resist process testing. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1972
- Accession Number
- AD0907880
Entities
People
- Daniel R. Ch'en
- Gilbert L. Varnell
- John M. Pankratz
Organizations
- Texas Instruments