Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.
Abstract
During the seventh quarter of this contract, significant achievements included a performance evaluation and debug of the Kent Cambridge Instruments Lanthanum Hexaboride electron gun and improvement of the process for marker definition for e-beam alignment. In addition, a trial lot was completed which tested the upgraded pattern definition and auto-align system (APR II), and six transistor lots were processed through the composite definition level.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1973
- Accession Number
- AD0912049
Entities
People
- Daniel R. Chen
- Gilbert L. Varnell
- John M. Pankratz
Organizations
- Texas Instruments