Pyroelectric/Integrated Circuit Infrared Imaging Array Development
Abstract
The development of techniques leading to the fabrication of thin polycrystalline triglycine sulfate films and their resulting characteristics as infrared detectors are described. The processing technology required to fabricate pyroelectric/integrated circuit thermal imaging arrays consisting of thin flim triglycine sulfate detectors on field effect integrated circuits is reviewed. The primary approach pursued under this program to the problem of providing the required high degree of thermal isolation between the detectors and the silicon substrate was to preferentially etch away the silicon underlying the detectors. In the resulting configuration, the thin thermally grown silicon dioxide membrane remaining after the etching process serves to support the detector. A second thermal isolation technique, in which a thin, permanently poled, single crystal section of TGS is positioned above its companion two- dimensional integrated circuit substrate, is also described. In this arrangement the resulting air gap provides the thermal issoation; contacts to the array detectors are made by means of vacuum deposited microfinger springs. The problem of providing thermal isolation proved to be the most difficult obstacle encountered during the program.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1973
- Accession Number
- AD0912475
Entities
People
- A. Boornard
- David L. Hall
- E. Herrmann
- R. D. Larrabee
- W. Morren