Plasma Jet Interactions with Liquids in Partial Fulfillment of an NRL Karles Fellowship

Abstract

Plasmas are a powerful medium that have enabled technologies across a wide spectrum of interdisciplinary fields due to their ability tosynthesize (e.g., coatings and thin film deposition), modify (e.g., chemical functionalization), and etch (in Si technology) materials. In lowpressurenon-equilibrium discharge plasmas, associated with the above processes, the electron population is much more energetic than boththe ions and neutral gas background in which the plasma is created, which allows them to sustain the plasma and also drive the production ofreactive neutral and excited species. Understanding and controlling plasma species production, their delivery to the surface, and the responseof the surface have been and will continue to be crucial to the advancements of these fields.

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Document Details

Document Type
Technical Report
Publication Date
Nov 30, 2015
Accession Number
AD1003276

Entities

People

  • Sandra Hangarter

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Barometric Pressure
  • Charged Particles
  • Chemical Reactions
  • Chemistry
  • Electrons
  • Films
  • Free Electrons
  • Frequency
  • Ionization
  • Ions
  • Liquid Phases
  • Materials
  • Measurement
  • Particle Physics
  • Plasma Jets
  • Protons
  • Thin Films

Readers

  • Aerospace Propulsion Engineering.
  • Nanocomposite Materials Science
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene