Breakthrough UV LIGA Microfabrication of Sub-mm and THz Circuits

Abstract

The U.S. Naval Research Laboratory has been developing a novel UV-LIGA process to create amplifier circuits from 100 GHz through the THz. A 670 GHz EIK ladder test piece has been successfully fabricated with a 0.004 inch diameter beam tunnel, and demonstrates sub-micronfabrication accuracies. The technique is being extended to showcase capabilities at 850 GHz, and 1.03, 1.35 and 1.50 THz.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2013
Accession Number
AD1004172

Entities

People

  • Alan M. Cook
  • Baruch Levush
  • Colin D. Joye
  • David Abe
  • Jeffrey P. Calame

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Aspect Ratio
  • Atmospheric Windows
  • Cavity Resonators
  • Diameters
  • Electron Beams
  • Fabrication
  • Filaments
  • Frequency
  • Machining
  • Manufacturing
  • Military Research
  • Resonant Frequency
  • Standards
  • Vibration
  • Waveguides

Readers

  • Electronics Engineering
  • Nanofabrication and Microfabrication.
  • Research Science/Academic Research