Printable Integrated Photonic Devices
Abstract
The objective of this US Air Force Phase II STTR project was to demonstrate imprintable, high refractive index material, high resolution imprint technology as well as imprinted photonic devices. A novel nanoimprint resist with refractive index over 2.0 and high optical transparency was synthesized. Novel "active" imprintable material was also developed with embedded QDs (optical gain media). An imprint process was developed that demonstrated unmatched sub-10 nm patterning resolution, high uniformity over a large area, and zero shrinkage. The developed technology is suitable for low cost fabrication of passive and active integrated optical devices such as nanolasers.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 16, 2016
- Accession Number
- AD1011247
Entities
People
- Alexander Koshelev
- Carlos Pina-hernandez
- Christophe Peroz
- Keiko Munechika